Electro-thermally driven microgrippers for micro-electro-mechanical systems applications
نویسندگان
چکیده
منابع مشابه
Fractional Order Control of Micro Electro-Mechanical Systems
This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...
متن کاملFractional Order Control of Micro Electro-Mechanical Systems
This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...
متن کاملMicro-Electro-Mechanical Systems (MEMS) for WDM Optical-Crossconnect Networks
MEMS (Micro-electro-mechanical systems) have shown promise for optical crossconnects in WDM networks. We will describe various MEMS optical-switching technologies, their successes in implementing important optical-networking functionalities, and future perspectives.
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2005
ISSN: 1932-5150
DOI: 10.1117/1.1899312